Christoph O. Steinbruchel
Associate Professor
Contact & Personal Information
Phone: (518) 276-2904
Fax: (518) 276-8554
Email: steinc@rpi.edu 
Mailing Address:
Materials Research Center
rm: 113
110 8th Street
Troy, New York
12180
Christoph O. Steinbruchel's homepage
Education
Ph.D., University of Minnesota
Chemical Physics
Professional Background
Professor Steinbruchel received a Ph.D. degree from the University of Minnesota in 1974. Before joining Rensselaer, he worked at the University of California, Berkeley, the University of Chicago, the Argonne National Laboratory, RCA Laboratories, and Mettler Instruments. Professor Steinbruchel has published extensively in the areas of plasma etching, sputtering, plasma diagnostics, and surface science. Steinbruchel's research program is in the area of thin film materials science, with application especially to microelectronics and sensor technology. This research includes all types of materials, the common theme being that they are used in the form of thin films.
Research
Microelectronics Technology
Materials for Microelectronic Systems
Thin Film
Research Bio
Electronic materials. Processing and characterization of thin films, particularly the deposition of films with desired structure and properties, and the carving out of miniature devices from such films by plasma and ion beam etching. Interactions at surfaces and at the interface between two films.
Publications
- A-site Deficiency, Phasepurity and Crystal Structure in Lanthanum Strontium Ferrite (2007)
Type: Article
Topic: Materials Processing - Plasma etching of benzocyclobutene in CF4/O2 and SF6/O2 plasmas (2006)
Type: Article
Topic: Plasma Engineering
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Marcia Hartnett, Administrative Assistant
Phone: (518) 276-6941
Email: hartnm2@rpi.edu
Mailing Address:
Jonsson Engineering Center
rm: 4049
110 8th Street
Troy, New York
12180