Center for Integrated Electronics

Ph.D., Agra University and University of Minnesota
Chemistry and Metallurgy and Materials Science

Silicon

Semiconductors

Metallurgy

Electronic Materials

Thin Film

Professor Murarka's research interests are electronic materials and their processing, especially in the area of metallization and dielectrics for semiconductor device and circuit applications. High-conductivity and high-reliability metal interconnections that carry the signals from the device to the user and vice versa, and low dielectric constant insulators are key to the success of the continued miniaturization of devices and integrated circuits. Coupled with the metallization research is research on dielectrics that are used as insulators between the metal interconnections. Deposition, planarization, characterization, patterning, defect generation mechanism and elimination, and reliability and performance evaluations are key factors that are addressed in this research.

Professor Murarka is a fellow of Institute of Electronic and Electrical Engineers, ASM International, the American Vacuum Society and the Electrochemical Society. He received the Distinguished Staff Award at Bell Laboratories in 1982 and the Thomas D. Callinan Award of the Electrochemical Society in 1987.